Key Features
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Sub-nanometer Resolution Geometric Modeling Engine
Supports more refined structural restoration to meet the simulation requirements of the most advanced process nodes.
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Reliable and Fast Large-Scale Modeling Capability
Whether for advanced logic, memory, or heterogeneous integrated structures, efficient and accurate modeling can be achieved.
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Comprehensive Support for Mainstream Semiconductor Manufacturing Processes
Covers key process modules such as deposition, etching, thermal processing, CMP, and ion implantation, creating an integrated process simulation platform from front-end to back-end.
Multi-Physics Co-Simulation Capabilities
Mozz Emulator is not just a geometric modeling tool but also an open co-simulation platform:
- Can integrate with RC parameter extraction tools for high-precision circuit modeling.
- Can connect with device simulators to advance precise Process-to-Device modeling.
- Can interface with thermal/stress multi-physics simulators, supporting co-simulation of key process modules for advanced packaging and 3D IC scenarios, creating an integrated process simulation platform from front-end to back-end.
The Mozz Emulator model can be printed as a physical entity through a 3D printer, as shown in the following figure:

