Mozz TCAD 2023.11 Released

This is a maintenance release that offers numerous new features, enhancements and bug fixes in almost every component.

A new component, RCEx, is added to the Mozz TCAD suite, which provides RC extraction capability on detailed 3D MEOL and BEOL structures. It is an integrative component in our DTCO flow, connecting TCAD, standard cell characterization and PEX deck development.

Mozz TCAD Process Simulator

  • New features:
    • "PARAM_SET" command to modify the diffusion parameters and diffusion factor.
    • SiC activation model: time-dependent moment1 model with high reaction speed.
    • Mesh flip to same direction.
    • Region merge function.
    • Can specify certain material during CMP etch.
    • Add temporary material for deposit and etch.
    • More parameters to control diffusion time step.
  • Bug fixes:
    • Correct OED effect for long time oxidation.
    • Correct continuous boundary at multiple regions intersection point.
    • Correct long time low-temperature diffusion.

Mozz TCAD Device Simulator

  • New features:
    • Enable Fermi distribution in fast transient solver, which is able to simulate device with millions of mesh nodes.
    • Simulator is tolerant of degenerated mesh elements, i.e. flat tetrahedron with zero volume.
    • Enable solder pad boundary embedded in the structure.
  • Bug fixes:
    • Fix a conservation issue in AC current which may cause an capacitance error around 1%.
    • Fix mobility issue of several materials when doping concentration is zero.
    • Fix solver with quad-double precision crash at parallel environment.
    • Fix an inaccurate issue of expm1 derivative evaluation.

Mozz TCAD Workbench

  • New features:

    • When a job is running, variables need to be extracted from the standard output of the job, no matter whether the job succeeds or fails in the process.
    • When the input configuration of the tool has no label information, the project configuration of the tool is not displayed in the edit input menu.
    • Support for modifying filter name.
    • Support the selection of run queues.
    • When adding Step, Module, or parameter, the function “apply” that allows for continuous addition.
    • The parameter values are similar to the numerical processing of 1, 1.0 1.0e0.
    • The Clean up Cell page supports Clear cell Files.
    • After the node is selected, preprocessed or deleted, the experiment still keeps the node selected.
    • Support Step, Module, Parameter copy, cut, paste.
    • When the Cell explorer is closed, the location and size are remembered. The next time cell explorer is opened in the original location.
    • Optimize the Cell explorer search style ,open the search box for text files by default.
    • Support selecting multiple cells to open and delete files.
    • Cell Explorer supports filtering files.
    • Support file type filtering ,when opening the visualization dialog.
    • Add create_ Link function. Only effective when preprocess=false.
    • Logs hide input file information that does not need to be preprocessed.
    • Merge run configuration to tool configuration, adding mruncfg information by default.

  • Bug fixes:

    • After selecting experiment save as project, the original project with modifications is directly closed, and the user needs to be prompted whether to save the modifications.
    • The selected cell is not maintained after you clean up the cell by using the title menu bar, toolbar, or Ctrl+D shortcut.
    • When there is a blank line before the first module, the system reports a warning during preprocessing.

Mozz TCAD Visual

  • New features:
    • Supported Sorting of One-Dimensional Curves.
    • Expanded support for 1D PLX data sets.
    • Supported customizable ticks positioning on 1D axis.
    • Supported display and control of 2D grids.
    • Optimized opening of DFISE files.
    • Introduction of "remove_plot" command.
    • Supported custom integration ranges.
  • Bug fixes:
    • Optimized return value on execution failure.
    • Fixed an issue with 3D rotation around an axis.

Mozz TCAD Structure

  • New features:
    • Provide multiple applications examples.
  • Bug fixes:
    • Return value of main function.
    • Region rename after splitting.
    • Region rename when importing sat file.

Mozz TCAD RCEx

  • New features:
    • Solve the Laplace equation on a tetrahedral finite element grid.
    • The capacitance between conductors is calculated in the dielectric area, and the resistance between the boundary port (including the user setting port) is solved inside the conductor.
    • Read-in geometry and tetrahedral finite element mesh data , support Mozz TCAD Structure/Process DF-ISE format.
    • Output contains capacitance matrix data, resistance matrix data, and a parasitic RC netlist assigning capacitance values in resistance ports.
    • Electric field data including electrostatic potential(scalar) , electric field (vector), current density (vector), and conductivity (scalar) is optional for output.
    • Mozz TCAD RCEx supports the setting of the interface surface resistivity on the boundary surface between conductors in the resistance calculation, and supports the three models of conductor conductivity modeling.
    • Support the capacitor/resistance distributed extraction function based on structure space segmentation.
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