Process Simulation
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Mozz Process simulates the fabrication steps in semiconductor processes in Si, SiGe, and SiC-based material systems. The following processes are modeled in Mozz Process.
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Processes
- Physics-based model
- Ion implantation
- Diffusion and dopant activation
- Thermal oxidation - Mechanical stress
- Phenomenological model
- Lithography
- Etching
- Deposition and epitaxial growth