Process Simulation

mprocess_55nm_nmos

Mozz Process simulates the fabrication steps in semiconductor processes in Si, SiGe, and SiC-based material systems. The following processes are modeled in Mozz Process.

  • Processes
    • Physics-based model
    • Ion implantation
    • Diffusion and dopant activation
    • Thermal oxidation - Mechanical stress
    • Phenomenological model
    • Lithography
    • Etching
    • Deposition and epitaxial growth
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